Method of making a suspended membrane device

摘要

The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities.

主权项

1. A method, comprising:
forming a support layer on a substrate; forming a membrane layer on the support layer; forming a plurality of openings in the membrane layer; forming a single, contiguous chamber having a plurality of integrated cavities, each of the plurality of openings positioned above and aligned with one of the plurality of integrated cavities; and forming a plurality of anchors in the single, contiguous chamber by removing portions of the support layer below the openings in the membrane layer.