发明名称 |
Semiconductor device having a gate all around structure |
摘要 |
A semiconductor includes a substrate including a first region and a second region, a fin extending in a first direction in the first region of the substrate, wherein the fin includes a first semiconductor pattern and a second semiconductor pattern that are disposed on each other, a first wire pattern extending in a second direction in the second region of the substrate, a first gate electrode disposed on the fin, wherein the first gate electrode extends in a third direction that is different from the first direction, and a second gate electrode surrounding an outer perimeter of the first wire pattern and extending in a fourth direction that is different from the second direction. |
申请公布号 |
US9601569(B1) |
申请公布日期 |
2017.03.21 |
申请号 |
US201514961378 |
申请日期 |
2015.12.07 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
Suk Sung-Dae;Seo Kang-Ill |
分类号 |
H01L29/06;H01L29/78;H01L29/423;H01L29/08;H01L27/12 |
主分类号 |
H01L29/06 |
代理机构 |
F. Chau & Associates, LLC |
代理人 |
F. Chau & Associates, LLC |
主权项 |
1. A semiconductor device comprising:
a substrate including a first region and a second region; a fin extending in a first direction in the first region of the substrate, wherein the fin includes a first semiconductor pattern and a second semiconductor pattern that are disposed on each other; a first wire pattern extending in a second direction in the second region of the substrate; a first gate electrode disposed on the fin, wherein the first gate electrode extends in a third direction that is different from the first direction; and a second gate electrode surrounding an outer perimeter of the first wire pattern and extending in a fourth direction that is different from the second direction. |
地址 |
Suwon-si, Gyeonggi-Do KR |