发明名称 METALLIC POLISHING PAD AND PRODUCTION METHOD THEREFOR
摘要 [Problem] There is provided a metallic abrasive pad capable of increasing a region on a worked surface, coming into contact with a catalyst or coming into extreme proximity thereto. [Solving Means] To that end, a metallic abrasive pad 2 for use in a smoothing operation applied to the worked surface 6a of a workpiece 6 by a catalyst-supported chemical machining method is made up of a compression-formed compact composed of one or more metal fibers made of a transition-metal catalyst. Since the compression-formed compact is made up of the one or more metal fibers, having a prescribed void ratio, the one or more metal fibers existing on an abrasion surface 2a can undergo elastic deformation. Accordingly, if the surface 2a of the metallic abrasive pad and the worked surface 6a of the workpiece 6 are put together by pressing, the one or more metal fibers are deformed in response to microscopic asperities existing on the worked surface 6a, thereby enabling a gap occurring between the metallic abrasive pad surface 2a and the worked surface 6a to be smaller. By so doing, a region, existing on the worked surface 6a, coming into contact with the catalyst or coming into extreme proximity thereto, can be increased.
申请公布号 EP3024015(A4) 申请公布日期 2017.03.15
申请号 EP20140826661 申请日期 2014.06.18
申请人 Nagoya Institute Of Technology;Sintokogio, Ltd. 发明人 ERYU Osamu;YAMAGUCHI Eiji
分类号 H01L21/304;B01J21/06;B01J23/755;B22F3/11;B22F3/14;B24B37/24 主分类号 H01L21/304
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