METHOD FOR PRODUCING SUBSTRATE FOR SEMICONDUCTOR LIGHT EMITTING ELEMENTS, METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMITTING ELEMENT, SUBSTRATE FOR SEMICONDUCTOR LIGHT EMITTING ELEMENTS, AND SEMICONDUCTOR LIGHT EMITTING ELEMENT

摘要

Provided are: a method for manufacturing a substrate for semiconductor light emitting elements, the substrate being capable of improving the light extraction efficiency of a semiconductor light emitting element; a method for manufacturing a semiconductor light emitting element; a substrate for semiconductor light emitting elements; and a semiconductor light emitting element. This substrate (11) for semiconductor light emitting elements has a light emitting structure formation surface (11S) on which a light emitting structure containing a semiconductor layer is formed, and the light emitting structure formation surface (11S) is provided with a flat part (14) that spreads along one crystal plane, a plurality of large-diameter projections (12) that project from the flat part (14), and a plurality of small-diameter projections (13) that are smaller than the large-diameter projections (12). At least some of the plurality of small-diameter projections (13) project from the outer surfaces of the large-diameter projections (12).