| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal treatment device for accurately controlling temperature inside a reaction tube.SOLUTION: A thermal treatment device comprises: a reaction tube 11 made from silicon carbide for accommodating an object to be processed; heating means 17 that is arranged on the outer periphery of the reaction tube so as to surround the reaction tube and is for heating the object to be processed accommodated inside the reaction tube; first temperature detection means having a temperature measurement unit in the vicinity of the heating means between the reaction tube and the heating means; second temperature detection means having a temperature measurement unit in the vicinity of the reaction tube between the reaction tube and the heating means; and a control unit for performing control by performing switching between a mode for controlling the heating means on the basis of a temperature detected by the first temperature detection means and a mode for controlling the heating means on the basis of a temperature detected by the second temperature detection means. The control unit controls the heating means on the basis of the temperature detected by the first temperature detection means in the case of raising the reaction tube's temperature, and on the basis of the temperature detected by the second temperature detection means in the case of performing thermal processing on the object to be processed.SELECTED DRAWING: Figure 2 |
