Diaphragm-type pressure gauge

摘要

A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel includes a housing into which the gas is introduced, and a sensor unit which is arranged in the housing, and includes a diaphragm electrode, a measurement surface of which is arranged parallel to an introduction direction of the gas. When the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to a direction of gravitational force.

主权项

1. A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel, the gauge comprising:
a housing having a member separating an internal space of the housing into a first space and a second space, the first space communicating with the vessel, and the gas being introduced into the first space; and a sensor unit arranged in the housing, the sensor unit including an insulating substrate having a first surface and a second surface opposing the first surface, a fixed electrode arranged on the first surface, a diaphragm electrode having a measurement surface facing the fixed electrode and arranged parallel to an introduction direction of the gas, the fixed electrode and the measurement surface facing an airtight reference pressure chamber formed between the insulating substrate and the diaphragm electrode, the second surface facing the first space, a surface of the diaphragm electrode, which opposes the measurement surface, facing the first space, wherein the insulating substrate and the diaphragm electrode are arranged in the first space, a capacitor constituted by the fixed electrode and the diaphragm electrode is connected to an electrode pad attached to the insulating substrate, the electrode pad is connected to a conductive wiring in the first space, and the conductive wiring extends through the member from the first space to the second space.