MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PLANAR MOTOR

摘要

A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.

主权项

1. A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor, comprising: a movable platform (100) of the coarse motion and fine motion integrated reticle stage, a balance mass (200), a drive motor for the movable platform of the coarse motion and fine motion integrated reticle stage, a mask plate (101), a base (001), a vibration isolation system (500), and a measurement system, wherein,
the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform of the coarse motion and fine motion integrated reticle stage, wherein, the drive motor for the movable platform of the coarse motion and fine motion integrated reticle stage is a moving-iron type planar motor (300), a mover (301) of the moving-iron type planar motor is a permanent magnet array mounted on a top surface of the movable platform of the coarse motion and fine motion integrated reticle stage, and a stator (302) of the moving-iron type planar motor is a coil array mounted on the balance mass.