SYSTEMS FOR SELECTIVELY FEEDING CHUNK POLYSILICON OR GRANULAR POLYSILICON IN A CRYSTAL GROWTH CHAMBER
摘要
A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.
申请公布号
WO2017031328(A1)
申请公布日期
2017.02.23
申请号
WO2016US47575
申请日期
2016.08.18
申请人
SUNEDISON SEMICONDUCTOR LIMITED;DAEVAC INTERNATIONAL CO., LTD.
发明人
YUN, Seok Min;PARK, Seong Su;JI, Jun Hwan;CHOI, Won-Jin;JUNG, UiSung;LEE, Young Jung;KOO, Tae Su;KIM, Sung-Jin