发明名称 SYSTEMS FOR SELECTIVELY FEEDING CHUNK POLYSILICON OR GRANULAR POLYSILICON IN A CRYSTAL GROWTH CHAMBER
摘要 A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.
申请公布号 WO2017031328(A1) 申请公布日期 2017.02.23
申请号 WO2016US47575 申请日期 2016.08.18
申请人 SUNEDISON SEMICONDUCTOR LIMITED;DAEVAC INTERNATIONAL CO., LTD. 发明人 YUN, Seok Min;PARK, Seong Su;JI, Jun Hwan;CHOI, Won-Jin;JUNG, UiSung;LEE, Young Jung;KOO, Tae Su;KIM, Sung-Jin
分类号 C30B15/02;C30B29/06 主分类号 C30B15/02
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