SEMICONDUCTOR DEVICE HAVING A METAL OXIDE METAL (MOM) CAPACITOR AND A PLURALITY OF SERIES CAPACITORS AND METHOD FOR FORMING

摘要

A capacitor module includes a semiconductor substrate of a first polarity. The substrate includes a deep well of a second polarity, a first well of the first polarity over the deep well, a second well of the second polarity over at least a portion of the deep well, a first capacitor including the first well as a first electrode, a dielectric layer over the first electrode, and an electrically conductive layer as a second electrode over the dielectric layer, and a second capacitor including the second well as a first electrode, a dielectric layer over the first electrode, and an electrically conductive layer as a second electrode over the dielectric layer. The first capacitor is coupled in series with the second capacitor. A metal-oxide-metal (MOM) capacitor overlays and is coupled in parallel with the first and second capacitors.

主权项

1. A semiconductor device comprising:
a capacitor module including:
a semiconductor substrate of a first polarity, the substrate including:
a deep well of a second polarity;a first well of the first polarity over the deep well;a second well of the second polarity over at least a portion of the deep well;a first capacitor including the first well as a first electrode, a dielectric layer over the first electrode, and an electrically conductive layer as a second electrode over the dielectric layer;a second capacitor including the second well as a first electrode, a dielectric layer over the first electrode, and an electrically conductive layer as a second electrode over the dielectric layer,wherein the first capacitor is coupled in series with the second capacitor;a metal-oxide-metal (MOM) capacitor overlaying and coupled in parallel with the first and second capacitors, the MOM capacitor including a first metal finger coupled to a first voltage terminal and a second metal finger coupled to a second voltage terminal, wherein the first and second voltage terminals are coupled to receive voltages that are different from one another.