| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for the visual inspection of a substrate where a vibration piece including an electrode is formed and to provide an imaging apparatus.SOLUTION: The method for the visual inspection of the substrate comprises irradiating the substrate having a first reflecting object on one of a first main surface and a second main surface being the back side of the first main surface and having optical transmittance with first light from the side of the first main surface in a direction crossing the first main surface, to receive the reflection component of the first light reflected by the first reflecting object by first receiving means and for irradiating the substrate with second light from the side of the second main surface in the direction crossing the first main surface, to receive the transmission component of the second light transmitted through the substrate by the first receiving means, to perform the visual inspection of the substrate. |
