ELECTRICAL FUSE AND/OR RESISTOR STRUCTURES

摘要

Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.

主权项

1. A structure comprising:
an efuse formed between gate metals in a dielectric material; the gate metals including a nitride capping material; the efuse is provided within a recess of the dielectric material; and the efuse comprises a nitride insulator material and a metal material which is in contact with a contact structure formed in an insulator material above the efuse.