保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法,申请号JP20160213437-传众专利搜索

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发明名称	保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法
摘要	【課題】歪みを生ずることなくウエハをステージ上に載置する。【解決手段】音圧源（超音波スピーカ１５０）を用いてウエハステージＷＳＴ（ウエハホルダＷＨ）上に載置されたウエハＷに向けて音圧（超音波）を放射することでウエハを音圧加振し、そして、ウエハホルダＷＨを用いてウエハを吸着保持する。これにより、歪みを生ずることなくウエハを保持し、ウエハホルダ上に載置することが可能となり、ひいては高いパターンの重ね精度を維持することが可能となる。【選択図】図２
申请公布号	JP2017033021(A)	申请公布日期	2017.02.09
申请号	JP20160213437	申请日期	2016.10.31
申请人	株式会社ニコン	发明人	神山隆英
分类号	G03F7/20;H01L21/683	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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