FLOATING PARTICLE DETECTION DEVICE

摘要

A floating particle detection device 1 is capable of accurately identifying the type of a floating particle while achieving simplification of a configuration of the device, the device includes: a laser light irradiator (10) that includes a laser light emitting element (11) and a back-monitor-use light receiving element (12); a scattered light receiver (20) that selectively receives light of a predetermined polarization component among scattered light generated when a floating particle (50) is irradiated and that generates a second detection signal; and an identification processor (30) that identifies the type of the floating particle on the basis of a first detection signal and the second detection signal. Incident light entering the back-monitor-use light receiving element (12) includes: a back-monitor-use laser beam (L0); and backscattered light (Lbs) travelling toward the laser light irradiator (10) among the scattered light (Ls).

主权项

1. A floating particle detection device comprising:
a laser light irradiator that includes a laser light emitting element including a front-side edge surface that emits an irradiation laser beam with which a detection-target region where floating particles are present is irradiated and a back-side edge surface that emits a back-monitor-use laser beam which travels in a direction opposite to a travel direction of the irradiation laser beam, and a back-monitor-use light receiving element disposed in a position where the back-monitor-use laser beam is incident, the back-monitor-use light receiving element generating a first detection signal according to an amount of incident light; a scattered light receiver that selectively receives light of a predetermined polarization component among scattered light of the irradiation laser beam, the scattered light being generated when a floating particle is irradiated, thereby generating a second detection signal; and an identification processor that identifies a type of the floating particle on a basis of the first detection signal and the second detection signal; wherein the incident light entering the back-monitor-use light receiving element includes the back-monitor-use laser beam and backscattered light travelling toward the laser light irradiator among the scattered light of the irradiation laser beam with which the floating particle is irradiated.