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发明名称
PIPING UNIT AND CLEANING APPARATUS HAVING THE SAME
摘要
배관유닛 및 이를 구비하는 세정장치가 개시된다. 기판에 초순수를 제공하는 배관유닛은 초순수를 유동시키는 배관부, 배관부와 연결되며, 기판에 초순수를 분사하는 분사부, 배관부의 중간에 구비되며, 내부에 초순수가 유동되도록 유로가 형성되고, 유동하는 초순수에서 정전기를 제거하도록 접지가 연결된 연결부를 포함할 수 있다.
申请公布号
KR20170014774(A)
申请公布日期
2017.02.08
申请号
KR20150108649
申请日期
2015.07.31
申请人
주식회사 케이씨텍
发明人
이재홍
分类号
H01L21/02;H01L21/67
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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