| 摘要 |
PROBLEM TO BE SOLVED: To suppress a thin film on a power generation region side from irregularly peeling when a dividing groove is formed during a manufacturing process of a thin film solar cell.SOLUTION: A scribing step of peeling off a thin film 14 from a top of a substrate 26 using a cutting tool to form a dividing groove 16 is performed, the cutting tool having a groove cutting blade 18 with a rectangular bottom face, at the front end thereof. In the scribing step, a first side wall 34 of the dividing groove 16 is formed by a non-power generation region 36 of an electric cell 12, and a second side wall 38 is formed by a power generation region 40. Further, when the groove cutting blade 18 is advanced relatively to the thin film 14, the front-end surface of the groove cutting blade 18, the front-end surface being on a side facing the thin film solar cell 10, is tilted so as to approach to the power generation region 40. Namely, a tilt angle &thetas; is provided between the longitudinal direction and the advancing direction of the groove cutting blade 18. The tilt angle &thetas; is set within a range of 0.5-10°. |
