A transfer head array (110) includes a body (110) and a plurality of transfer heads (120). The body has a first surface, a second surface opposite to the first surface, and a plurality of recesses (111). The first surface has at least one chucking region and at least one interference avoidance region, and the recesses are separated from each other and are disposed in the interference avoidance region. The transfer heads are disposed on the chucking region.
