发明名称 ワイヤ放電加工装置、これを用いた薄板の製造方法及び半導体ウエハの製造方法
摘要 To perform highly accurate cutting according to stable power feed from a machining power supply, a wire electric discharge machining apparatus includes a wire wound over main guide rollers a plurality of times to simultaneously perform a plurality of kinds of cutting. Wire laying work for a plurality of the wires on power feed elements is reduced, uniform power is fed to cutting wire sections, stable machining is intended, and according to alignment positions, for each of units, a plurality of the power feed elements are aligned to correspond to a wire parallel arrangement interval of the cutting wire sections set as power feed targets and are disposed to feed power to the cutting wire sections with an interval of at least every other cutting wire section.
申请公布号 JP6072236(B2) 申请公布日期 2017.02.01
申请号 JP20150518121 申请日期 2014.02.28
申请人 三菱電機株式会社 发明人 三宅 英孝;糸数 篤;橋本 隆
分类号 B23H7/10;B23H7/02;B23H9/00 主分类号 B23H7/10
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