| 摘要 |
The invention provides a semiconductor test device, refers to a comprehensive semiconductor test device with a plurality of testers, and can prevent metal fatigue of wirings connected with the testers. The semiconductor test device combines DC characteristic tests carried out by a DC tester and AC characteristic tests carried out by an AC tester; and comprises the following structures: a lower movable structure (57) for fixing DUT (testing element); an upper movable structure (59) comprising a terminal group (62) connected with the DC tester and the AC tester and cylinders (53, 54) with a short circuit electrode (71); and a fixing tool for fixing a wiring group (61) is configured between the upper movable structure and the lower movable structure. An expansion cylinder (53) enables the wiring group (61) to be disconnected from the terminal group (62) when the DC test is carried out, and the expansion cylinder (53) enables the wiring group (61) to be disconnected from the terminal group (62). |
