WAVEGUIDE SHEET, FABRICATION METHOD THEREOF AND SPECTROMETER USING THE SAME

摘要

An fabrication method of a waveguide sheet for a spectrometer includes the steps of: providing a pattern to be performed by a microelectromechanical (MEM) process; and forming at least one waveguide sheet based on the provided pattern by the MEM process. The pattern includes a shape of a first waveguide sheet. The waveguide sheet includes at least one positioning side and at least one stray light elimination side formed by the MEM process. The positioning side is for a spectral component of the spectrometer to abut against so that the spectral component is positioned at the positioning side, and the stray light elimination side is to be used as a side of a stray light outlet. The structure of the waveguide sheet and the configuration of the spectrometer are also provided.

主权项

1. A fabrication method of a waveguide sheet for a spectrometer, comprising:
providing a pattern to be performed by a microelectromechanical (MEM) process, wherein the pattern comprises a shape of a first waveguide sheet; and forming at least one waveguide sheet based on the provided pattern by the MEM process, wherein the waveguide sheet comprises at least one positioning side and at least one stray light elimination side formed by the MEM process, the positioning side is for a spectral component of the spectrometer to abut against so that the spectral component is positioned at the positioning side, and the stray light elimination side is to be used as a side of a stray light outlet.