GAS PURGE UNIT, LOAD PORT APPARATUS, AND INSTALLATION STAND FOR PURGING CONTAINER

摘要

A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 capable of detachably contacting with an intake port 5 on a tip portion of the pivotable body 31. The ring-shaped O-ring 33 is held between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28 in a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection 28b.

主权项

1. A gas purge unit for flowing a cleaning gas into a purging container having a flowing port with a flowing opening via the flowing port, comprising:
a nozzle member provided with a nozzle opening for flowing the cleaning gas and a cylindrical projection projecting from an upper surface of a base portion to upward; a pivotable body arranged in ring shape on the base portion to surround the cylindrical projection With a first space and provided with a contact part capable of detachably contacting with the flowing port on a tip portion of the pivotable body; and a first pivot support portion with ring shape held between a rear end of the pivotable body and the base portion in a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection, wherein: the contact part is composed of an elastic member; a second space is formed between the rear end of the pivotable body and the upper surface of the base portion; the first space and the second space allow the pivotable body to pivot with respect to the nozzle member and absorb an angle of inclination of the pivotable body; and the pivotable support portion is compressively elastically deformed in a range of the first space and the second space.