发明名称 |
PROGRAMMABLE DEPOSITION APPARATUS |
摘要 |
A deposition apparatus including a frame and a cylindrical drum with a cylindrical surface that extends along a central axis. The drum has a first and a second end surface, which extend perpendicularly to the central axis. The drum is rotatably mounted in the frame and includes a plurality of gas zones positioned on the cylindrical surface. The included gas channels extend within the drum. At least a number of the gas zones are in gas connection with at least two channels. The deposition apparatus includes closing elements for closing off all but one of the at least two channels with which a said gas zone is in gas connection so that the type of gas supplied to the various gas zones along the drum surface is programmable. |
申请公布号 |
WO2017014639(A1) |
申请公布日期 |
2017.01.26 |
申请号 |
WO2016NL50552 |
申请日期 |
2016.07.25 |
申请人 |
MEYER BURGER (NETHERLANDS) B.V. |
发明人 |
DE ROIJ, Pieter Jan |
分类号 |
C23C16/455;C23C16/458;C23C16/54 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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