发明名称 樹脂貼着装置
摘要 PROBLEM TO BE SOLVED: To expand a liquid resin over one face of a plate work in a short time regardless of a plate work area.SOLUTION: A resin affixing device 1 comprises: an outer circumference connecting part 7 for forming a sealed resin expansion chamber 8 by connecting an outer circumferential surface 44 of a holding surface 43 of hold means 40 and an outer circumferential part of a placement surface 31 of a placement table 30; and negative pressure means 80 for making the inside of the resin expansion chamber 8 into negative pressure. The negative pressure means 80 is formed from a suction port 81 formed on a surface outside of the holding surface 43, a suction path 82 communicating the suction port 81 and a suction source 9, and an opening/closing valve 83 for opening/closing the suction path 82, such that the inside of the resin expansion chamber 8 can be made into negative pressure by vacuuming the inside of the resin expansion chamber 8 from the suction port 81 by means of the negative pressure means 80 in the state where the resin expansion chamber 8 sealed by the outer circumference connecting part 7 is formed. Therefore, a liquid resin 5 can be affixed even to a plate work of a wide area while being expanded over all a bottom face Wb of a plate work W in a short time.
申请公布号 JP6068915(B2) 申请公布日期 2017.01.25
申请号 JP20120224019 申请日期 2012.10.09
申请人 株式会社ディスコ 发明人 桑名 一孝;小野寺 寛
分类号 H01L21/683;H01L21/304 主分类号 H01L21/683
代理机构 代理人
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