发明名称 樹脂封止方法及び樹脂封止装置
摘要 The method is capable of resin-molding one side face of a work (W) in a molding die set (1), in which the work (W) is sucked and held on at least one of clamping faces and resin-molded in a cavity concave section (4). The method comprises the steps of: sucking and holding a release film (12) which covers at least one of the clamping faces of the molding die set (1); setting the work (W) in the molding die set (1); sucking the other side face of the work (W) through a work sucking hole (12g) of the release film (12), which is formed before or after holding the release film (12), so as to hold the work (W) on the clamping face; closing the molding die set (1) so as to clamp the work (W); and pressurizing and heating the resin (24), which has been accommodated in the cavity concave section (4), with resin (24).
申请公布号 JP6065179(B2) 申请公布日期 2017.01.25
申请号 JP20120274729 申请日期 2012.12.17
申请人 アピックヤマダ株式会社 发明人 田上 秀作;村松 吉和;前川 昌範;中沢 英明;藤沢 雅彦;宮本 拓也
分类号 H01L21/56;B29C33/18;B29C43/18;B29C43/32;B29C43/36 主分类号 H01L21/56
代理机构 代理人
主权项
地址