| 摘要 |
PROBLEM TO BE SOLVED: To provide an edge detection apparatus capable of positively recognizing the boundary between a calf region and a laser groove region.SOLUTION: An edge detection apparatus 1 comprises: a laser groove 22 formed by irradiation with laser light along a planned division line 16; a CCD 40 for imaging the planned division line 16, the laser groove 22 and a calf 24 from above on a semiconductor wafer 10 having the calf 24, which is deeper than the laser groove 22 and formed by grinding along the laser groove 22 by a grinding blade SP1; an object lens 30 which is located between the planned division line 16 and the CCD 40 and has a depth of field shallower than the calf 24; and a lightning apparatus 50 for irradiating the object lens 30 with light from a coaxial direction relative to an observation light axis which connects between the object lens 30 and the CCD 40. |
