| 摘要 |
A mass flow controller (10) comprises a fluid inlet (15) and at least one first flow meter (11) to measure a first flow rate (F1) and to output a first flow signal (FS1); at least one second flow meter (12) to measure a second flow (F2) rate and to output a second flow signal (FS2); a control device (13) connected to said first and second flow meters (11,12) and configured and arranged to generate a control signal (C); and at least one control valve (14) connected to said control device (13) to control a total flow rate (Fout) through the mass flow controller (10) in response to the control signal (C). The control signal (C) is generated as a function of both the first and second flow signals (FS1,FS2) such that the mass flow controller's (10) sensitivity to perturbations of said inlet pressure is minimized. |
