| 摘要 |
PROBLEM TO BE SOLVED: To estimate a flow rate of gas with high precision from a start stage of a process even when a measured error includes a systematic error.SOLUTION: In a device 20 for estimating the flow rate of gas, a correction coefficient pre-calculation part 23 calculates input/output quantitative ratios of both of the Ar gas and carbon contained in exhaust gas in each of the past operation results and calculates an advance correction coefficient kfor correcting the systematic error to be included in a measured value of the flow rate of the exhaust gas by using the calculated input/output quantitative ratio and a correction pre-processing part 24 corrects the measured value of the flow rate of the exhaust gas by using the advance correction coefficient kcalculated by the correction coefficient pre-calculation part 23. As a result, the flow rate of the exhaust gas can be estimated with high precision from the start stage of the process even when the measured error includes the systematic error. |
