| 发明名称 |
Sensor |
| 摘要 |
A sensor comprising a silicon substrate having a first and a second surface, integrated circuitry provided on the first surface of the silicon substrate, and a sensor structure provided on the second surface of the silicon substrate. The sensor structure and the integrated circuitry are electrically coupled to each other. |
| 申请公布号 |
US9546884(B2) |
申请公布日期 |
2017.01.17 |
| 申请号 |
US201012889832 |
申请日期 |
2010.09.24 |
| 申请人 |
NXP B.V. |
发明人 |
Daamen Roel;Humbert Aurelie;Merz Matthias;Ponomarev Youri Victorovitch |
| 分类号 |
G06K19/06;G01D5/14 |
主分类号 |
G06K19/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A sensor comprising:
a single silicon substrate having a first surface and an opposing second surface that is different than the first surface; integrated circuitry in the first surface of the silicon substrate; and a sensor structure circuit on the second surface of the silicon substrate and electrically coupled to the integrated circuitry by vias, wherein the sensor structure includes portions that are interdigitated, and the sensor structure is configured and arranged to sense environmental conditions of an atmosphere by generating an output signal in response to the atmosphere physically contacting the sensor structure. |
| 地址 |
Eindhoven NL |
