Micro device transfer head array

摘要

A micro device transfer head array and method of forming a micro device transfer array from an SOI substrate are described. In an embodiment, the micro device transfer head array includes a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include a silicon interconnect and an array of silicon electrodes electrically connected with the silicon interconnect. Each silicon electrode includes a mesa structure protruding above the silicon interconnect. A dielectric layer covers a top surface of each mesa structure.

主权项

1. A bipolar micro device transfer head array comprising:
a base substrate; an array of electrostatic transfer heads, each electrostatic transfer head including a pair of silicon electrodes, and a dielectric material covering a top surface of the pair of silicon electrodes; wherein each silicon electrode is doped.