发明名称 IONIZATION PRESSURE GAUGE WITH BIAS VOLTAGE AND EMISSION CURRENT CONTROL AND MEASUREMENT
摘要 Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias voltage. Emission current and cathode bias voltage can be controlled independently of each other, without a servo settling time. HCIGs can be calibrated with respect to leakage current.
申请公布号 WO2017007531(A1) 申请公布日期 2017.01.12
申请号 WO2016US32070 申请日期 2016.05.12
申请人 MKS INSTRUMENTS, INC. 发明人 HANSEN, Douglas, C.
分类号 G01L21/32 主分类号 G01L21/32
代理机构 代理人
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