| 摘要 |
PURPOSE:To provide a method capable of precisely detecting the displacement of an inspected object. CONSTITUTION:Prior to the attraction of an inspected object D to a nozzle N, the initial coordinate positions of the nozzle N and a position correcting mark M provided near the nozzle N and integrally with the nozzle N are determined, and the initial coordinate positions are stored in an image processing part VC. The respective attracted state coordinate positions for the inspection target D attracted to the nozzle Z and the position correcting mark M are determined. The coordinate position obtained by correcting the attracted state coordinate position of the inspected object D in reference to the difference (u) between the initial coordinate position and attracted state coordinate position of the position correcting mark M is taken as the coordinate position of the inspected object D. |
