Fabrication of complex three-dimensional structures based on directed assembly of self-assembling materials on activated two-dimensional templates

摘要

Methods of fabricating complex three-dimensional structures on patterned substrates and related compositions are provided. The methods involve depositing on the substrate a block copolymer material that is “mismatched” to the substrate pattern, and then ordering the material to form a complex three-dimensional structure. According to various embodiments, the copolymer material mismatches the substrate pattern in that the symmetry and/or length scale of its bulk morphology differs from that of the pattern. When ordered, a balance between the physics that determines the bulk block copolymer morphology and the physics that determines the substrate surface interfacial interactions results in a thermodynamically stable complex three-dimensional film that varies in a direction perpendicular to the substrate and has a morphology that differs from its bulk morphology.

主权项

1. A structure comprising:
a chemically patterned substrate, the chemical pattern comprising discrete regions of a first chemical functionality surrounded by a second chemical functionality; and a phase separated block copolymer thin film overlying the chemically patterned substrate, the film including discrete elements of a first phase in a matrix of a second phase, wherein a first set of the discrete elements of the first phase overlie the discrete regions of the first chemical functionality and a second set of the discrete elements of the first phase overlie the second chemical functionality.