Surface topography interferometer with surface color

摘要

Systems and methods for generating 3D representations of shape and color texture of a test surface are described. In one aspect, surface topography interferometers are equipped with a multi-element detector and an illumination system to produce a true-color image of the measured object surface. Color information can be presented as a true-color two-dimensional image or combined with topography information to form a three-dimensional representation of the shape and color texture of the object, effectively creating for a human observer the impression of looking at the actual part.

主权项

1. An interferometry system of comprising:
an illumination module configured to generate multiple different spectral light distributions; a multi-element detector; an imaging module configured to
image, on the multi-element detector, a surface of a test object using test light, andcombine the test light, on the multi-element detector, with reference light to form an interference pattern, the test and reference light being derived from the illumination module; and an electronic control module communicatively coupled with at least the illumination module and the multi-element detector, wherein, during operation, the electronic control module
causes the illumination module to sequentially illuminate the surface of the test object with the multiple different spectral light distributions while the multi-element detector correspondingly records interference patterns and images of the surface of the test object,determines information about (i) a shape of the surface of the test object, at least in part, from the interference patterns recorded for one or more of the multiple different spectral light distributions, and (ii) a color of the surface of the test object, at least in part, from images recorded for two or more of the multiple spectral distributions, wherein the information about the color of the surface of the test object is determined by the electronic control module as a true-color image, such that each pixel of the true-color image comprises an average of corresponding pixels of the images of the surface of the test object respectively illuminated with the two or more of the multiple spectral distributions, wherein fringes of interference patterns in the images of the surface of the test object illuminated with respective two or more of the multiple spectral distributions are removed by the electronic control module prior to generation of the average associated with the true-color image, and generates a representation of the shape and the color of the surface of the test object from the determined information.