发明名称 |
OPTICAL-MECHANICAL VIBRATING BEAM ACCELEROMETER |
摘要 |
Systems, devices, techniques, and methods are disclosed for an opto-mechanical vibrating beam accelerometer. In one example, a system is configured to couple a laser into optical resonance with opto-mechanically active (OMA) anchors suspending a proof mass; lock frequencies of the laser to optical resonances of the OMA anchors, resulting in a modulated laser coupled with the OMA anchors; demodulate a photocurrent that detects the modulated laser coupled with the OMA anchors to detect at least an amplitude or a phase of the modulated laser; lock a frequency of the modulated laser to dynamically track instantaneous resonance frequencies of mechanical modes of the OMA anchors through changes to the amplitude or phase of the modulated laser induced by coupling of the modulated laser to the OMA anchors; and measure an acceleration based on instantaneous resonance frequencies of the OMA anchors through changes to the amplitude or phase of the modulated laser. |
申请公布号 |
EP3112879(A1) |
申请公布日期 |
2017.01.04 |
申请号 |
EP20160174468 |
申请日期 |
2016.06.14 |
申请人 |
Honeywell International Inc. |
发明人 |
FERTAG, Chad;SAVCHENKO, Arthur;TIN, Steven |
分类号 |
G01P15/093;G01P15/097;G01P21/00 |
主分类号 |
G01P15/093 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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