Exposure apparatus and device manufacturing method

摘要

An apparatus which projects a pattern of an original onto a substrate by a projection optical system within a chamber to expose the substrate, comprises a measurement unit which performs measurement to calculate a deformation amount of the original, and a controller which calculates a predicted deformation amount of the original and corrects a projection magnification of the projection optical system so as to correct the predicted deformation amount, based on information representing a relationship between the deformation amount with reference to a shape of the original at a certain temperature and a time for which the original receives exposure light, a deformation amount of the original before exposure determined based on a measurement value obtained by measuring, by the measurement unit, the deformation amount of the original loaded into the chamber and unused for exposure, and the time for which the original receives the exposure light.

主权项

1. An exposure apparatus which projects a pattern of an original onto a substrate by a projection optical system within a chamber to expose the substrate, comprising:
a measurement unit configured to obtain a measurement value; and a controller configured to calculate a predicted deformation amount of the original and to correct a projection magnification of the projection optical system so as to correct the predicted deformation amount, the predicted deformation amount of the original is calculated based on information representing a relationship between a deformation amount of the original with reference to a shape of the original at a certain temperature and a time for which the original receives exposure light, wherein in the calculation of the predicted deformation amount of the original, the controller determines an elapsed time in the relationship, the elapsed time is corresponding to the deformation amount of the original which is loaded into the chamber and unused for exposure based on the measurement value before exposure, and calculates the predicted deformation amount of the original based on the determined elapsed time in the relationship, the time for which the original receives the exposure light, and the information.