SOLID SOURCE AND METHOD FOR THE SYNTHESIS OF SILICON-CONTAINING PRECURSORS FOR CHEMICAL VAPOR DEPOSITION

摘要

The present document described a solid source and a method for synthesis of silicon-containing precursors for chemical vapor deposition. The solid source comprises a solid polysilane; an energy coupling agent distributed in the solid polysilane; and hydrogen, mixed with the solid polysilane and the energy coupling agent distributed in the solid polysilane, in a necessary amount to satisfy a hydrogen deficiency during a hydrogenolysis reaction.

主权项

1. A solid source for synthesis of silicon-containing precursors for chemical vapor deposition, the solid source comprising:
a solid polysilane; an energy coupling agent distributed in the solid polysilane; and hydrogen, mixed with the solid polysilane and the energy coupling agent distributed in the solid polysilane, in a necessary amount to satisfy a hydrogen deficiency during a hydrogenolysis reaction.