发明名称 SEMICONDUCTOR MEMORY AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor memory includes a plurality of stripe-like active areas formed by stacking, in a direction perpendicular to a substrate, a plurality of layers extending parallel to the substrate, a first gate electrode formed on first side surfaces of the active areas, the first side surfaces being perpendicular to the substrate, a second gate electrode formed on second side surfaces of the active areas, the second side surfaces being perpendicular to the substrate. The layers are patterned in self-alignment with each other, intersections of the active areas and the first gate electrode form a plurality of memory cells, and the plurality of memory cells in an intersecting plane share the first gate electrode.
申请公布号 US2016351621(A1) 申请公布日期 2016.12.01
申请号 US201615231616 申请日期 2016.08.08
申请人 Kabushiki Kaisha Toshiba 发明人 KIYOTOSHI Masahiro;YAMAMOTO Akihito;OZAWA Yoshio;ARAI Fumitaka;SHIROTA Riichiro
分类号 H01L27/24;H01L27/115;H01L45/00;H01L21/02;H01L21/28;H01L21/762;H01L21/3213;H01L21/3105;H01L21/321;H01L29/51;H01L21/306 主分类号 H01L27/24
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地址 Tokyo JP