摘要 |
A pilot-operated solenoid valve (1) includes a pilot valve unit (2) having a fixed core (22) and a movable core (18), and a passage block (3) formed with a valve seat (55) which a diaphragm valve element (60) comes into contact or separates from. The pilot valve unit (2) includes an NO port (13), a common port (14), and an NC port (15). The passage block (3) is formed with an inlet port (49), an outlet port (50), a back chamber (54), an NO passage (45), a common passage (46), an NC passage (47) an external exhaust passage (48), and an internal exhaust passage (59). The solenoid valve (1) further includes a first or second metal ball (70, 71) to seal the external exhaust passage (48) or the internal exhaust passage (59). The passage block (3) includes a flat cover (30) formed with a communication passage (32) for communicating the recess (35) with the common port (14). |