| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine particle measuring device which can form a beam spot with a desired size.SOLUTION: A fine particle measuring device comprises: a light source; an image forming lens system that is composed of a first image forming lens and a second image forming lens and that forms an image of a beam spot of laser emitted from the light source on a fine particle; a relay lens system that is composed of a first relay lens and a second relay lens and that is disposed between the first image forming lens and the second image forming lens; an optical filter that is disposed between the second relay lens and the second image forming lens; a detector that detects fluorescence or scattering light generated from the fine particle by irradiation with the laser; and an optical fiber that is disposed between the optical filter and the detector. The detector detects the fluorescence or scattering light via the optical filter and the optical fiber.SELECTED DRAWING: Figure 1 |
