发明名称 半導体装置の製造方法
摘要 A method of manufacturing a semiconductor device includes forming a barrier metal film on a surface of at least one of a first electrode of a wiring board and a second electrode of a semiconductor element, providing a connection terminal between the first and second electrodes, the connection terminal being made of solder containing tin, bismuth and zinc, and bonding the connection terminal to the barrier metal film by heating the connection terminal and maintaining the temperature of the connection terminal at a constant temperature not lower than a melting point of the solder for a certain period of time.
申请公布号 JP6028593(B2) 申请公布日期 2016.11.16
申请号 JP20130013433 申请日期 2013.01.28
申请人 富士通株式会社 发明人 清水 浩三;作山 誠樹;宮島 豊生
分类号 H01L21/60;H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/60
代理机构 代理人
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