| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope that eliminates an influence of thermal electrons and can obtain a clear specimen image even though a temperature of a specimen and a peripheral part thereof is 1,100°C or higher, and to provide a method for observing the specimen.SOLUTION: The electron microscope comprises: a specimen stage for mounting at least a specimen thereon; an electron detector for detecting detection electrons generated by irradiating the specimen with an electron beam; and an electron accelerating device that is provided between the specimen stage and the electron detector, and accelerates the detection electrons toward a direction of the electron detector. The electron microscope further comprises an electron shielding sheet that is provided between the specimen stage and the electron accelerating device, has a melting point of 1,100°C or higher and a specific heat of 0.1 cal/g K or less, and has a through hole for passing the detection electrons therethrough. |
