发明名称 |
FABRICATION OF THREE-DIMENSIONAL HIGH SURFACE AREA ELECTRODES |
摘要 |
A method for fabricating three dimensional high surface electrodes is described. The methods including the steps: designing the pillars; selecting a material for the formation of the pillars; patterning the material; transferring the pattern to form the pillars; insulating the pillars and providing a metal layer for increased conductivity. Alternative methods for fabrication of the electrodes and fabrication of the electrodes using CMOS are also described. |
申请公布号 |
EP2932526(A4) |
申请公布日期 |
2016.10.19 |
申请号 |
EP20130861546 |
申请日期 |
2013.12.13 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
MUJEEB-U-RAHMAN, MUHAMMAD;SCHERER, AXEL |
分类号 |
H01L21/28;H01L29/41 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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