PROTECTIVE COVER AND SUBSTRATE PROCESSING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a protective cover capable of reliably preventing a fork of a substrate transfer device from being damaged during maintenance and after maintenance, and a substrate processing device using the protective cover.SOLUTION: A protective cover 140 for protecting a fork 61 of a substrate transfer device 200 includes: a cover body 110 through which the fork can be visually recognized from the outside when the fork is covered; and a light blocking plate 120 mounted to the cover body and capable of blocking light of an opposing-type photodetector 65 mounted to each of a pair of fingers of the fork when the protective cover covers the fork.SELECTED DRAWING: Figure 5