BIOMIMETIC BASED PRESSURE SENSOR MANUFACTURING METHOD AND PRESSURE SENSOR MANUFACTURED THEREBY

摘要

A biomimetic-based pressure sensor manufacturing method according to the present invention comprises: (a) a step of forming a plurality of micropillars on each of a pair of PDMS substrates from a silicon microhole pattern; (b) a step of growing nanowire in a plurality of micropillars formed on the pair of PDMS substrates; (c) a step of partially coating any one of the pair of PDMS substrates, in which the nanowire has grown in the micropillars, with a metal film; and (d) a step of engaging the PDMS substrates in which the nanowire has grown, among the pair of PDMS substrates, with the PDMS substrate which has been partially coated with the metal film in step (c). The method is effective in improving the performance as a pressure sensor by maximizing the surface area and enabling effective pressure transmission.