| 摘要 |
The present invention is provided with: a boat such that a plurality of substrate plates each having a mounting surface extending in the vertical direction are arrayed along the direction of the normal line of the mounting surfaces; a conveyance mechanism that conveys the boat in the direction of the normal line of the mounting surfaces; an image acquisition device that acquires a determination image including a portion of the upper side of the substrate plates and the corners of the substrates mounted to the mounting surfaces including a portion of both the top side of the substrates and the lateral side linking to the top side; and a determination device that, on the basis of the relative position of the substrate plates and the substrates extracted from the determination image, determines whether or not the substrates are mounted to the mounting surface at a normal attitude. |
