发明名称 圧電素子、液体噴射ヘッドおよび液体噴射装置
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric element in which crystal near a piezoelectric layer and interfaces of electrodes holding the piezoelectric layer has good quality and which has excellent piezoelectric properties.SOLUTION: A piezoelectric element 100 comprises: a first conductive layer 10; a second conductive layer 20 arranged opposite to the first conductive layer 10; and a piezoelectric layer 30 disposed between the first conductive layer 10 and the second conductive layer 20 and formed of composite oxide containing at least lead, zirconium, titanium, and oxygen. The piezoelectric layer 30 has a lead concentration gradient region 32 where concentration of lead increases from a side of the first conductive layer 10 to a side of the second conductive layer 20, and the lead concentration gradient region 32 is disposed on an end of the piezoelectric layer 30 on the side of the first conductive layer 10.
申请公布号 JP5999386(B2) 申请公布日期 2016.09.28
申请号 JP20140219251 申请日期 2014.10.28
申请人 セイコーエプソン株式会社 发明人 両角 浩一;原 寿樹;加藤 治郎;傳田 聡
分类号 H01L41/187;B41J2/14;H01L41/09;H01L41/318;H01L41/39 主分类号 H01L41/187
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