CORRECTION DEVICE, CORRECTION METHOD, PROGRAM, AND ELECTROSTATIC CAPACITANCE TYPE PRESSURE SENSOR

摘要

A correction device includes a specification unit which specifies an ultimate load F X at the time of an increase in applied load, a correction value generation unit which generates a correction value for electrostatic capacitance actually read at the time of a decrease in load based on the ultimate load F X specified by the specification unit, a first function f PEAK (F X ) for generating a maximum value of a hysteresis when the ultimate load F X is changed, and a second function f HYS (F N /F X ×F MAX ) for generating a hysteresis when a rated load F MAX of the electrostatic capacitance type pressure sensor is applied, and a correction unit which corrects electrostatic capacitance actually read at the time of a decrease in applied load using the correction value.