| 摘要 |
PROBLEM TO BE SOLVED: To provide a material for holding an article to be polished, which has no buff streak on a surface and which improves surface waviness.SOLUTION: A material 1 for holding an article to be polished includes a foam layer 3 having tear-drop type air bubbles 2. While a surface close to an overgrown part of the tear-drop type air bubbles 2 serves as a holding surface for holding the article to be polished, an adhesive member 6 for being fixed to a surface plate is stuck on a surface close to a taper-shaped part of the tear-drop type air bubbles 2. The holding surface is formed by being separated from a smooth base material. |
