| 发明名称 |
METAL ORGANIC CHEMICAL VAPOR DEPOSITION APPARATUS FOR SOLAR CELL |
| 摘要 |
A metal organic chemical vapor deposition apparatus for a solar cell includes a deposition unit. The deposition unit includes a susceptor to be mounted with a substrate, and a shower head to prepare a reacting gas by mixing plural kinds of raw gases for deposition and supply the reacting gas to the susceptor. |
| 申请公布号 |
EP3061845(A2) |
申请公布日期 |
2016.08.31 |
| 申请号 |
EP20160153823 |
申请日期 |
2016.02.02 |
| 申请人 |
LG ELECTRONICS INC. |
发明人 |
YOU, DONGJOO;YOON, WONKI;LEE, HEONMIN |
| 分类号 |
C23C16/455;C23C16/44;C23C16/458 |
主分类号 |
C23C16/455 |
| 代理机构 |
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