发明名称 MEASURING APPARATUS AND MEASURING METHOD
摘要 A measuring apparatus (1) measures the amount of a metal catalyst supported on a sample (9) that has a membrane of a metal catalyst layer (91) containing the metal catalyst. The measuring apparatus includes a terahertz-wave emitting part (10) that emits a terahertz wave in the range of 0.01 to 10 THz to the sample (9), a transmitted-terahertz-wave detection part (30) that detects the electric field intensity of a transmitted terahertz wave (LT2) that has passed through the sample (9), a storage (60) that stores correlation information (C1) acquired in advance and indicating the correlation between the amount of the metal catalyst supported and the electric field intensity of the transmitted terahertz wave (LT2), and an amount-of-catalyst-supported acquisition module (511) that acquires the amount of the metal catalyst supported on the sample (9), on the basis of the correlation information and the electric field intensity of the transmitted terahertz wave detected by the transmitted-terahertz-wave detection part (30).
申请公布号 EP3062089(A1) 申请公布日期 2016.08.31
申请号 EP20160155957 申请日期 2016.02.16
申请人 SCREEN HOLDINGS CO., LTD. 发明人 TAKASE, YASUHIRO;NAKANISHI, HIDETOSHI;KONO, MOTOHIRO;KINOSE, KAZUO
分类号 G01N21/84;G01N21/3586 主分类号 G01N21/84
代理机构 代理人
主权项
地址