| 摘要 |
An air slider device (1) according to one embodiment of the direct levitation device has a slide shaft (2) of rectangular shape, and a slider (3) of frame shape having aerostatic bearing surfaces (31A-31D) of planar shape facing objects to be supported (21). On the back side of porous layers (32A-32D) that form the aerostatic bearing surfaces (31A-31D), the slider (3) has air supply channels (33A-33D) that include air supply slots in a pattern along the edges of the surfaces to be supported (21) of the slide shaft (2). A direct levitation device for achieving more highly accurate linear guidance can be achieved thereby. |
